Invention Application
- Patent Title: INTERCONNECT STRUCTURE HAVING POWER RAIL STRUCTURE AND RELATED METHOD
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Application No.: US15220764Application Date: 2016-07-27
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Publication No.: US20180033718A1Publication Date: 2018-02-01
- Inventor: Erdem Kaltalioglu , Atsushi Ogino
- Applicant: GLOBALFOUNDRIES INC.
- Main IPC: H01L23/498
- IPC: H01L23/498 ; H01L21/48

Abstract:
Disclosed herein is an integrated circuit (IC) including a first metal layer running in a first direction, a second metal layer running in a second direction perpendicular to the first direction, the second metal layer above the first metal layer and a third metal layer running in the first direction above the second metal layer. A viabar electrically connects the first metal layer to the third metal layer, the viabar running in the first direction wherein the viabar vertically extends from the first metal layer to the third metal layer. A method of manufacturing the IC is provided.
Public/Granted literature
- US09997456B2 Interconnect structure having power rail structure and related method Public/Granted day:2018-06-12
Information query
IPC分类: