Invention Application
- Patent Title: MICRO SENSOR
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Application No.: US15674127Application Date: 2017-08-10
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Publication No.: US20180045663A1Publication Date: 2018-02-15
- Inventor: Bum Mo AHN , Seung Ho PARK , Sung Hyun BYUN
- Applicant: POINT ENGINEERING CO., LTD.
- Priority: KR10-2016-0102340 20160811
- Main IPC: G01N27/12
- IPC: G01N27/12 ; G01N33/00

Abstract:
Disclosed is a micro sensor. Particularly, a first sensor electrode is provided on a first side of a substrate, a second sensor electrode is provided on a second side of the substrate, and the substrate is provided with an etching hole penetrating from the first side to the second side of the substrate. A sensing material provided between the first sensor electrode and the second sensor electrode is inserted in the etching hole. When detecting gas, the micro sensor can minimize influence of moisture in air.
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