A conductive route structure may be formed comprising a conductive trace and a conductive via, wherein the conductive via directly contacts the conductive trace. In one embodiment, the conductive route structure may be formed by forming a dielectric material layer on the conductive trace. A via opening may be formed through the dielectric material layer to expose a portion of the conductive trace and a blocking layer may be from only on the exposed portion of the conductive trace. A barrier line may be formed on sidewalls of the via opening and the blocking layer may thereafter be removed. A conductive via may then be formed within the via opening, wherein the conductive via directly contacts the conductive trace.