Invention Application
- Patent Title: STACKED TYPE SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING THE SAME
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Application No.: US15822860Application Date: 2017-11-27
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Publication No.: US20180083022A1Publication Date: 2018-03-22
- Inventor: Tatsuya KATO , Wataru SAKAMOTO , Fumitaka ARAI
- Applicant: Toshiba Memory Corporation
- Applicant Address: JP Minato-ku
- Assignee: Toshiba Memory Corporation
- Current Assignee: Toshiba Memory Corporation
- Current Assignee Address: JP Minato-ku
- Main IPC: H01L27/11556
- IPC: H01L27/11556 ; H01L27/11548 ; H01L27/11519

Abstract:
According to one embodiment, a semiconductor memory device includes a substrate, semiconductor pillars, first electrode films, a second electrode film, a first insulating film, a second insulating film, and a contact. The semiconductor pillars are provided on the substrate, extend in a first direction crossing an upper surface of the substrate, and are arranged along second and third directions being parallel to the upper surface and crossing each other. The first electrode films extend in the third direction. The second electrode film is provided between the semiconductor pillars and the first electrode films. The first insulating film is provided between the semiconductor pillars and the second electrode film. The second insulating film is provided between the second electrode film and the first electrode films. The contact is provided at a position on the third direction of the semiconductor pillars and is connected to the first electrode films.
Public/Granted literature
- US10249635B2 Three-dimensional semiconductor memory device and method for manufacturing the same Public/Granted day:2019-04-02
Information query
IPC分类: