Invention Application
- Patent Title: SEMICONDUCTOR DEVICE INCLUDING OPTIMIZED GATE STACK PROFILE
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Application No.: US15277722Application Date: 2016-09-27
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Publication No.: US20180090596A1Publication Date: 2018-03-29
- Inventor: Victor Chan , Jin Ping Han
- Applicant: International Business Machines Corporation
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/49

Abstract:
A semiconductor device is provided with an electrically conductive gate having an enhanced gate profile. The semiconductor device includes a semiconductor substrate that extends along a first axis to define a length and a second axis opposite the first axis to define a height. A channel region is interposed between opposing source/drain regions, and a gate stack is atop the semiconductor substrate. The gate stack includes an electrically conductive gate atop the channel region. The electrically conductive gate includes sidewalls extending between a base and an upper surface to define a gate height. A gate length of the electrically conductive gate continuously increases as the gate height increases from the base to the upper surface.
Public/Granted literature
- US09929250B1 Semiconductor device including optimized gate stack profile Public/Granted day:2018-03-27
Information query
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