Invention Application
- Patent Title: CHEMICALLY PATTERNED GUIDE LAYERS FOR USE IN CHEMOEPITAXY DIRECTING OF BLOCK CO-POLYMERS
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Application No.: US15724662Application Date: 2017-10-04
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Publication No.: US20180096838A1Publication Date: 2018-04-05
- Inventor: Jinhua Dai , Joyce Lowes
- Applicant: Brewer Science Inc.
- Main IPC: H01L21/027
- IPC: H01L21/027 ; C08F120/68 ; C08F120/18 ; B05D1/00 ; H01L21/02

Abstract:
The present invention is broadly concerned with materials, processes, and structures that allow an underlayer to be imaged directly using conventional lithography, thus avoiding the photoresist processing steps required by prior art directed self-assembly (DSA) processes. The underlayers can be tailored to favor a selected block of the DSA block co-polymers (BCP), depending on the pattern, and can be formulated either to initially be neutral to the BCP and switch to non-neutral after photoexposure, or can initially be non-neutral to the BCP and switch to neutral after exposure. These materials allow fast crosslinking to achieve solvent resistance and possess good thermal stability.
Public/Granted literature
- US10366887B2 Method of using chemically patterned guide layers in chemoepitaxy directing of block co-polymers Public/Granted day:2019-07-30
Information query
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