Invention Application
- Patent Title: Semiconductor Memory Devices
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Application No.: US15480983Application Date: 2017-04-06
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Publication No.: US20180097006A1Publication Date: 2018-04-05
- Inventor: Sung Gil Kim , Ji-Hoon Choi , Dongkyum Kim , Jintae Noh , Seulye Kim , Hong Suk Kim , Phil Ouk Nam , Jaeyoung Ahn
- Applicant: Samsung Electronics Co., Ltd.
- Priority: KR10-2016-0128216 20161005
- Main IPC: H01L27/11556
- IPC: H01L27/11556 ; H01L29/08 ; H01L27/11582 ; H01L29/10

Abstract:
A semiconductor memory device may include: a stacking structure including a plurality of insulating layers and a plurality of gate electrodes alternately stacked on a substrate; a lower semiconductor pattern that protrudes from the top of the substrate; a vertical insulating pattern that extends in a vertical direction from the substrate and penetrates the stacking structure; and a vertical channel pattern on the inner surface of the vertical insulating pattern and contacting the lower semiconductor pattern, wherein an upper part of the lower semiconductor pattern includes a recess region including a curve-shaped profile, and in the recess region, the outer surface of a lower part of the vertical channel pattern contacts the lower semiconductor pattern along a curve of the recess region.
Public/Granted literature
- US10263006B2 Semiconductor memory devices Public/Granted day:2019-04-16
Information query
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