Invention Application
- Patent Title: DEVICES AND METHODS OF FORMING UNMERGED EPITAXY FOR FINFET DEVICE
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Application No.: US15821091Application Date: 2017-11-22
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Publication No.: US20180097089A1Publication Date: 2018-04-05
- Inventor: Hui ZANG , Bingwu LIU
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/78

Abstract:
Devices and methods of growing unmerged epitaxy for fin field-effect transistor (FinFet) devices are provided. One method includes, for instance: obtaining a wafer having at least one source, at least one drain, and at least one fin; etching to expose at least a portion of the at least one fin; forming at least one sacrificial gate structure; and forming a first layer of an epitaxial growth on the at least one fin. One device includes, for instance: a wafer having at least one source, at least one drain, and at least one fin; a first layer of an epitaxial growth on the at least one fin; at least one second layer of an epitaxial growth superimposing the first layer of an epitaxial growth; and a first contact region over the at least one source and a second contact region over the at least one drain.
Public/Granted literature
- US10483377B2 Devices and methods of forming unmerged epitaxy for FinFet device Public/Granted day:2019-11-19
Information query
IPC分类: