- 专利标题: SYSTEMS AND METHODS FOR BIAS SUPPRESSION IN A NON-DEGENERATE MEMS SENSOR
-
申请号: US15466778申请日: 2017-03-22
-
公开(公告)号: US20180118557A1公开(公告)日: 2018-05-03
- 发明人: Daniel Endean , John Reinke
- 申请人: Honeywell International Inc.
- 主分类号: B81B3/00
- IPC分类号: B81B3/00 ; B81B7/00
摘要:
Systems and methods for suppressing bias in a non-degenerate vibratory structure are provided. In certain embodiments, a vibratory structure includes a first proof mass; a second proof mass, wherein the first proof mass and the second proof mass are driven into motion along a first axis, wherein the first proof mass and the second proof mass move in anti-phase along a second axis, wherein the motion of the first proof mass and the second proof mass along the second axis is such that the centers of mass of the first proof mass and the second proof mass move collinearly along a same axis.
公开/授权文献
信息查询