SYSTEMS AND METHODS FOR BIAS SUPPRESSION IN A NON-DEGENERATE MEMS SENSOR

    公开(公告)号:US20180118557A1

    公开(公告)日:2018-05-03

    申请号:US15466778

    申请日:2017-03-22

    IPC分类号: B81B3/00 B81B7/00

    摘要: Systems and methods for suppressing bias in a non-degenerate vibratory structure are provided. In certain embodiments, a vibratory structure includes a first proof mass; a second proof mass, wherein the first proof mass and the second proof mass are driven into motion along a first axis, wherein the first proof mass and the second proof mass move in anti-phase along a second axis, wherein the motion of the first proof mass and the second proof mass along the second axis is such that the centers of mass of the first proof mass and the second proof mass move collinearly along a same axis.

    SYSTEMS AND METHODS FOR NOISE AND DRIFT CALIBRATION USING DITHERED CALIBRATION

    公开(公告)号:US20180094928A1

    公开(公告)日:2018-04-05

    申请号:US15366971

    申请日:2016-12-01

    摘要: Systems and methods for noise and drift calibration using dithered calibration, a system comprising a processing unit; and two or more dithered calibrated sensors that provide directional measurements to the processing unit, wherein a dithered calibrated sensor in the dithered calibrated sensors has an input axis that rotates about an axis such that bias error can be removed by the processing unit; wherein the dithered calibrated sensor provides a zero-bias measurement along a first axis and a low-noise measurement along a second axis, the second axis being orthogonal to the first axis; wherein the dithered calibrated sensors are arranged such that the dithered calibrated sensor provide low-noise and zero-bias measurements along the measured axes; and wherein the processing unit executes an algorithm to combine measurements that are along the same axis to produce a measurement for each measured axis that has both low-noise and zero-bias.

    ROTATION MEASUREMENT SYSTEM USING CORIOLIS AND EULER FORCES

    公开(公告)号:US20230057613A1

    公开(公告)日:2023-02-23

    申请号:US17405476

    申请日:2021-08-18

    发明人: Daniel Endean

    IPC分类号: G01C19/5705 G01C21/18

    摘要: A rotation measurement system that includes at least two proof masses and at least one pick-off is provided. Each proof mass is driven in a first axis of motion. The at least one pick-off is configured to measure movement of the at least two proof masses in a second axis when the system is rotated about a rotation point and generate Coriolis signals and Euler signals based on the measured movement of the at least two proof masses.

    METHODS FOR VIBRATION IMMUNITY TO SUPPRESS BIAS ERRORS IN SENSOR DEVICES

    公开(公告)号:US20210284527A1

    公开(公告)日:2021-09-16

    申请号:US17189745

    申请日:2021-03-02

    IPC分类号: B81B7/00

    摘要: A method for tuning one or more sensor devices is provided, wherein each sensor device comprises one or more proof masses configured to move in response to an external stimulus of interest, and the one or more proof masses are also susceptible to move in response to one or more stimuli other than the external stimulus of interest. Each sensor device also comprises one or more pick-off mechanisms respectively associated with each of the one or more proof masses. The one or more pick-off mechanisms is proportionally responsive to a motion of the sensor device. The method for tuning includes adjusting gain of one or more of the pick-off mechanisms to reduce an output of each sensor device when the one or more proof masses move in response to the one or more stimuli other than the external stimulus of interest.

    Systems and methods for bias suppression in a non-degenerate MEMS sensor

    公开(公告)号:US10696541B2

    公开(公告)日:2020-06-30

    申请号:US15466778

    申请日:2017-03-22

    摘要: Systems and methods for suppressing bias in a non-degenerate vibratory structure are provided. In certain embodiments, a vibratory structure includes a first proof mass; a second proof mass, wherein the first proof mass and the second proof mass are driven into motion along a first axis, wherein the first proof mass and the second proof mass move in anti-phase along a second axis, wherein the motion of the first proof mass and the second proof mass along the second axis is such that the centers of mass of the first proof mass and the second proof mass move collinearly along a same axis.

    Methods for vibration immunity to suppress bias errors in sensor devices

    公开(公告)号:US12012327B2

    公开(公告)日:2024-06-18

    申请号:US17189745

    申请日:2021-03-02

    IPC分类号: B81B7/00

    摘要: A method for tuning one or more sensor devices is provided, wherein each sensor device comprises one or more proof masses configured to move in response to an external stimulus of interest, and the one or more proof masses are also susceptible to move in response to one or more stimuli other than the external stimulus of interest. Each sensor device also comprises one or more pick-off mechanisms respectively associated with each of the one or more proof masses. The one or more pick-off mechanisms is proportionally responsive to a motion of the sensor device. The method for tuning includes adjusting gain of one or more of the pick-off mechanisms to reduce an output of each sensor device when the one or more proof masses move in response to the one or more stimuli other than the external stimulus of interest.

    Rotation measurement system using Coriolis and Euler forces

    公开(公告)号:US11796318B2

    公开(公告)日:2023-10-24

    申请号:US17405476

    申请日:2021-08-18

    发明人: Daniel Endean

    IPC分类号: G01C21/18 G01C19/5705

    CPC分类号: G01C19/5705 G01C21/18

    摘要: A rotation measurement system that includes at least two proof masses and at least one pick-off is provided. Each proof mass is driven in a first axis of motion. The at least one pick-off is configured to measure movement of the at least two proof masses in a second axis when the system is rotated about a rotation point and generate Coriolis signals and Euler signals based on the measured movement of the at least two proof masses.

    IN-PLANE NON-DEGENERATE CORIOLIS VIBRATORY GYROSCOPE

    公开(公告)号:US20200292313A1

    公开(公告)日:2020-09-17

    申请号:US16298879

    申请日:2019-03-11

    发明人: Daniel Endean

    IPC分类号: G01C19/5621

    摘要: A gyroscope device comprising an in-plane vibratory structure comprises an outer proof mass including first and second proof mass portions, and an inner proof mass interposed between the first and second proof mass portions. A first set of drive combs is on the outer proof mass, and a second set of drive combs is on the inner proof mass. A first set of sense electrodes is above each of the proof masses, and a second set of sense electrodes is below each of the proof masses. The drive combs cause the proof masses to vibrate along a drive axis in an anti-phase mode. The sense electrodes sense motions of the proof masses along a sense axis perpendicular to the drive axis. The orientation of a measurement axis relative to a plane of the proof masses is such that the measurement axis is parallel to the plane of the proof masses.

    SYSTEMS AND METHODS FOR BIAS SUPPRESSION IN A NON-DEGENERATE MEMS SENSOR

    公开(公告)号:US20200346920A1

    公开(公告)日:2020-11-05

    申请号:US16917292

    申请日:2020-06-30

    摘要: Systems and methods for suppressing bias in a non-degenerate vibratory structure are provided. In certain embodiments, a vibratory structure includes a first proof mass; a second proof mass, wherein the first proof mass and the second proof mass are driven into motion along a first axis, wherein the first proof mass and the second proof mass move in anti-phase along a second axis, wherein the motion of the first proof mass and the second proof mass along the second axis is such that the centers of mass of the first proof mass and the second proof mass move collinearly along a same axis.