发明申请
- 专利标题: TEMPERATURE-MEASURING APPARATUS, INSPECTION APPARATUS, AND CONTROL METHOD
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申请号: US15799431申请日: 2017-10-31
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公开(公告)号: US20180136275A1公开(公告)日: 2018-05-17
- 发明人: Sakiko SHIMIZU , Akira IKEDA
- 申请人: SEIKO EPSON CORPORATION
- 申请人地址: JP Tokyo
- 专利权人: SEIKO EPSON CORPORATION
- 当前专利权人: SEIKO EPSON CORPORATION
- 当前专利权人地址: JP Tokyo
- 优先权: JP2016-221167 20161114
- 主分类号: G01R31/28
- IPC分类号: G01R31/28
摘要:
A temperature-measuring apparatus includes a heat source capable of changing a heat generation temperature, a temperature sensor that detects a temperature of a predetermined position other than a measurement target accommodated in a measurement subject, and a temperature computation portion that computes a temperature of the measurement target on the basis of heat balance characteristics of the temperature of the measurement target, a temperature of the heat source, and the temperature of the predetermined position, the temperature of the heat source, and the detected temperature of the predetermined position.
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