Invention Application
- Patent Title: NON-VOLATILE STORAGE DEVICE AND METHOD OF MANUFACTURING THE SAME
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Application No.: US15897623Application Date: 2018-02-15
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Publication No.: US20180175057A1Publication Date: 2018-06-21
- Inventor: Masaaki HIGUCHI , Masaru KITO , Masao SHINGU
- Applicant: Toshiba Memory Corporation
- Priority: JP2013-187523 20130910
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L27/1157

Abstract:
According to an embodiment, a non-volatile storage device includes a first layer, a second layer formed on the first layer, a stacked body including a plurality of conductive films stacked on the second layer, and a semiconductor pillar which penetrates the stacked body and the second layer and reaches the first layer. The semiconductor pillar includes a semiconductor film formed along an extending direction of the semiconductor pillar, and a memory film which covers a periphery of the semiconductor film. The memory film includes a first portion formed between the stacked body and the semiconductor film and a second portion formed between the second layer and the semiconductor film. An outer periphery of the second portion in a plane perpendicular to the extending direction is wider than an outer periphery of the first portion on a second layer side of the stacked body.
Public/Granted literature
- US10985173B2 Non-volatile storage device and method of manufacturing the same Public/Granted day:2021-04-20
Information query
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