- 专利标题: PHOTOMASK HAVING AN EXPOSURE CORRECTION FUNCTION
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申请号: US15312073申请日: 2016-08-03
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公开(公告)号: US20180180988A1公开(公告)日: 2018-06-28
- 发明人: Chunqian ZHANG , Caiqin CHEN
- 申请人: WUHAN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
- 优先权: CN201610550097.2 20160713
- 国际申请: PCT/CN2016/093068 WO 20160803
- 主分类号: G03F1/36
- IPC分类号: G03F1/36 ; G03F1/38
摘要:
A photomask having an exposure correction function includes a shading region and an exposure region enclosed by the shading region. The exposure region comprises a correction sub-region and an exposure sub-region. The correction sub-region is arranged on a periphery of an acute angle vertex of the exposure sub-region.
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