发明申请
- 专利标题: MICROMECHANICAL SOUND TRANSDUCER SYSTEM AND CORRESPONDING MANUFACTURING METHOD
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申请号: US15861787申请日: 2018-01-04
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公开(公告)号: US20180192204A1公开(公告)日: 2018-07-05
- 发明人: Ahmad Mansour , Daniel Pantel , Fabian Purkl , Kerrin Doessel , Thomas Buck , Thomas Northemann
- 申请人: Robert Bosch GmbH
- 优先权: DE102017200111.9 20170105
- 主分类号: H04R17/02
- IPC分类号: H04R17/02 ; H04R17/00 ; H04R31/00 ; B81B3/00
摘要:
A micromechanical sound transducer system includes a substrate that includes (a) a cavity with a cavity edge area, (b) a front side, and (c) a rear side; a piezoelectric vibrating beam that is elastically suspended on the front side and that extends across the cavity; and, for the piezoelectric vibrating beam, a respective deflection limiting device that is on a front edge area of the respective vibrating beam and that is configured to limit a deflection of the respective vibrating beam to a limiting deflection by causing the respective front edge area of the respective vibrating beam to interact with the cavity edge area or an opposing front edge area of another vibrating beam.
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