SENSOR WITH MULTIPLE SENSING ELEMENTS
摘要:
A multi-element sensor includes a substrate having a surface. A first sensing element for sensing an environmental attribute is disposed on or over the substrate surface. A second sensing element is disposed over the same substrate surface as the first sensing element, above the first sensing element in a direction orthogonal to the substrate surface. The second sensing element is arranged for sensing the same environmental attribute. In one configuration, the first and second sensing elements sense the same environmental attribute at a location between the first and second sensing elements.
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