Invention Application
- Patent Title: MICROMECHANICAL SYSTEM INCLUDING A SENSITIVE ELEMENT AND ASSOCIATED MANUFACTURING METHOD
-
Application No.: US15887567Application Date: 2018-02-02
-
Publication No.: US20180237290A1Publication Date: 2018-08-23
- Inventor: Daniel Haug , Hans-Peter Baer , Mike Schwarz , Volkmar Senz
- Applicant: Robert Bosch GmbH
- Priority: DE102017202605.7 20170217
- Main IPC: B81B3/00
- IPC: B81B3/00 ; B81C1/00

Abstract:
A micromechanical system including a sensitive element, the system including a first area in which the sensitive element is situated, and a second area which at least partially surrounds the first area. Furthermore, the system includes a holding element having an elastic property, which joins the first area to the second area, and a joining material, with the aid of which the second area may be joined to a substrate. A spacing area is provided between the first area and the second area. The joining material extends into the spacing area so that a possible movement of the first area caused by the elastic property of the holding element is limited.
Public/Granted literature
- US10442681B2 Micromechanical system including a sensitive element and associated manufacturing method Public/Granted day:2019-10-15
Information query