- 专利标题: FABRICATION OF OPTICAL METASURFACES
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申请号: US15799654申请日: 2017-10-31
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公开(公告)号: US20180240653A1公开(公告)日: 2018-08-23
- 发明人: Gleb M. Akselrod , Erik E. Josberger , Mark C. Weidman
- 申请人: Elwha LLC
- 主分类号: H01J37/32
- IPC分类号: H01J37/32 ; G02F1/1341 ; G02F1/1339 ; G02F1/01 ; H01J37/317
摘要:
The method is provided for fabricating an optical metasurface. The method may include depositing a conductive layer over a holographic region of a wafer and depositing a dielectric layer over the conducting layer. The method may also include patterning a hard mask on the dielectric layer. The method may further include etching the dielectric layer to form a plurality of dielectric pillars with a plurality of nano-scale gaps between the pillars.
公开/授权文献
- US10199415B2 Fabrication of optical metasurfaces 公开/授权日:2019-02-05
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