Invention Application
- Patent Title: MEMS DEVICE AND PROCESS
-
Application No.: US15895689Application Date: 2018-02-13
-
Publication No.: US20180244516A1Publication Date: 2018-08-30
- Inventor: Marek Sebastian PIECHOCINSKI
- Applicant: Cirrus Logic International Semiconductor Ltd.
- Applicant Address: GB Edinburgh
- Assignee: Cirrus Logic International Semiconductor Ltd.
- Current Assignee: Cirrus Logic International Semiconductor Ltd.
- Current Assignee Address: GB Edinburgh
- Priority: GB1604303.6 20160314
- Main IPC: B81B7/00
- IPC: B81B7/00 ; B81C1/00 ; H04R19/04 ; G01L9/00 ; H04R7/26

Abstract:
The application describes MEMS transducers and associated methods of fabrication. The MEMS transducer has a flexible membrane with a vent structure comprising a moveable portion which opens in response to a differential pressure across the membrane to provide a flow path through the membrane. At least one edge of the moveable portion comprises one or more protrusions and/or recesses in the plane of the moveable portion.
Information query