- 专利标题： METHOD AND APPARATUS FOR SUBSTRATE TRANSFER AND RADICAL CONFINEMENT
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申请号： US15963758申请日： 2018-04-26
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公开(公告)号： US20180247850A1公开(公告)日： 2018-08-30
- 发明人: Jared Ahmad LEE , Martin Jeff SALINAS , Paul B. REUTER , Imad YOUSIF , Aniruddha PAL
- 申请人： Applied Materials, Inc.
- 主分类号： H01L21/677
- IPC分类号： H01L21/677 ; H01L21/687 ; H01L21/306 ; C23C16/455 ; C23C16/458
摘要：
Embodiments of the present invention provide an apparatus for transferring substrates and confining a processing environment in a chamber. One embodiment of the present invention provides a hoop assembly for using a processing chamber. The hoop assembly includes a confinement ring defining a confinement region therein, and three or more lifting fingers attached to the hoop. The three or more lifting fingers are configured to support a substrate outside the inner volume of the confinement ring.
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