发明申请
- 专利标题: PROFILE MEASURING MACHINE
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申请号: US15916688申请日: 2018-03-09
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公开(公告)号: US20180266817A1公开(公告)日: 2018-09-20
- 发明人: Shoji KASHIWABUCHI , Kazuaki KAWARAI
- 申请人: MITUTOYO CORPORATION
- 申请人地址: JP Kanagawa
- 专利权人: MITUTOYO CORPORATION
- 当前专利权人: MITUTOYO CORPORATION
- 当前专利权人地址: JP Kanagawa
- 优先权: JP2017-050989 20170316
- 主分类号: G01B21/20
- IPC分类号: G01B21/20 ; G01B5/00
摘要:
A profile measuring machine includes: a first column and a second column forming a portal structure of a movement mechanism supporting a probe; a first guide made of a first material and configured to guide the first column; a second guide provided in parallel to the first guide, made of a second material different from the first material, and configured to guide the second column; a first support supporting the first guide on a foundation; a second support supporting the second guide on the foundation; and a thermal expansion compensator configured to compensate a difference in thermal expansion between the first guide and the second guide.
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