公开(公告)号：US20180266817A1

公开(公告)日：2018-09-20

申请号：US15916688

申请日：2018-03-09

Applicant: MITUTOYO CORPORATION

Inventor： Shoji KASHIWABUCHI ,  Kazuaki KAWARAI

IPC: G01B21/20 ,  G01B5/00

CPC classification number: G01B21/20 ,  G01B5/0014 ,  G01B5/008 ,  G01B21/045

Abstract: A profile measuring machine includes: a first column and a second column forming a portal structure of a movement mechanism supporting a probe; a first guide made of a first material and configured to guide the first column; a second guide provided in parallel to the first guide, made of a second material different from the first material, and configured to guide the second column; a first support supporting the first guide on a foundation; a second support supporting the second guide on the foundation; and a thermal expansion compensator configured to compensate a difference in thermal expansion between the first guide and the second guide.