Invention Application
- Patent Title: ALTERNATING BETWEEN DEPOSITION AND TREATMENT OF DIAMOND-LIKE CARBON
-
Application No.: US15717897Application Date: 2017-09-27
-
Publication No.: US20180274100A1Publication Date: 2018-09-27
- Inventor: Yang Yang , Kartik Ramaswamy , Eswaranand Venkatasubramanian , Kenneth S. Collins , Steven Lane , Gonzalo Antonio Monroy , Lucy Chen , Yue Guo
- Applicant: Applied Materials, Inc.
- Main IPC: C23C16/48
- IPC: C23C16/48 ; C23C16/27 ; C23C16/52 ; C23C16/56 ; C23C16/44 ; H01L21/02 ; H01J37/32 ; H01J37/302 ; H01J37/317
Abstract:
A method of forming a layer of diamond-like carbon on a workpiece includes supporting the workpiece in a chamber with the workpiece facing an upper electrode, and forming a plurality of successive sublayers to form the layer of layer of diamond-like carbon by alternating between depositing a sublayer of diamond-like carbon on the workpiece in the chamber and treating the sublayer with a plasma of the inert gas or an electron beam from the upper electrode.
Information query
IPC分类:
