Invention Application
- Patent Title: APPARATUS CONFIGURED FOR SPUTTER DEPOSITION ON A SUBSTRATE, SYSTEM CONFIGURED FOR SPUTTER DEPOSITION ON A SUBSTRATE, AND METHOD FOR SPUTTER DEPOSITION ON A SUBSTRATE
-
Application No.: US15761028Application Date: 2016-04-28
-
Publication No.: US20180277343A1Publication Date: 2018-09-27
- Inventor: John M. WHITE
- Applicant: Applied Materials, Inc.
- International Application: PCT/US2016/029740 WO 20160428
- Main IPC: H01J37/34
- IPC: H01J37/34 ; C23C14/35

Abstract:
The present disclosure provides an apparatus configured for sputter deposition on a substrate. The apparatus includes a cylindrical sputter cathode rotatable around a rotational axis, and a magnet assembly configured to provide a first plasma racetrack and a second plasma racetrack on opposite sides of the cylindrical sputter cathode, wherein the magnet assembly includes two, three or four magnets each having two poles and one or more sub-magnets, wherein the two, three or four magnets are configured for generating both the first plasma racetrack and the second plasma racetrack.
Information query