Invention Application
- Patent Title: CYLINDRICAL BASE, MASTER AND MASTER MANUFACTURING METHOD
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Application No.: US15950596Application Date: 2018-04-11
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Publication No.: US20180281239A1Publication Date: 2018-10-04
- Inventor: Yutaka MURAMOTO , Masanao KIKUCHI , Shunichi KAJIYA , Takaaki OTOWA , Yasuhiro TAKAHASHI
- Applicant: DEXERIALS CORPORATION
- Applicant Address: JP Tokyo
- Assignee: DEXERIALS CORPORATION
- Current Assignee: DEXERIALS CORPORATION
- Current Assignee Address: JP Tokyo
- Priority: JP2013-264358 20131220
- Main IPC: B29C33/42
- IPC: B29C33/42 ; G11B7/26 ; B29C33/38 ; G03F7/00 ; G03F7/24 ; B29C35/08 ; B29C41/28 ; B29C59/04 ; C03C15/00 ; B29D11/00 ; B29L11/00

Abstract:
Provided are a cylindrical base, a master and a method for manufacturing a master enabling a uniform transfer of a fine pattern. A cylindrical base of a quartz glass having an internal strain in terms of birefringence of less than 70 nm/cm is used. A resist layer is deposited to an outer circumference surface of this cylindrical base, a latent image is formed on the resist layer, the latent image formed on the resist layer is developed and the pattern of the developed resist layer is used as a mask for etching to form a structure including concaves or convexes arranged in a plurality of rows on the outer circumference surface of the cylindrical base.
Public/Granted literature
- US11090886B2 Cylindrical base, master and master manufacturing method Public/Granted day:2021-08-17
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