Invention Application
US20180305616A1 ETCHANT
审中-公开
- Patent Title: ETCHANT
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Application No.: US16017563Application Date: 2018-06-25
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Publication No.: US20180305616A1Publication Date: 2018-10-25
- Inventor: Satoru YOSHIZAKI , Yoshihiro MUKAI
- Applicant: Nagase ChemteX Corporation
- Priority: JP2016-108908 20160531
- Main IPC: C09K13/00
- IPC: C09K13/00 ; C08K5/092 ; C08K5/42

Abstract:
The present invention provides an etchant which is usable for a long period of time owing to its high indium solubility and reduced precipitation of a salt of oxalic acid and indium, and further has excellent residue removal and antifoaming properties, thereby being suitable for etching indium oxide-based films. An etchant for etching an indium oxide-based film, the etchant containing: (A) oxalic acid; (B) polyvinylpyrrolidone; and (C) water.
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