- 专利标题: METHOD AND DEVICE FOR PRODUCING A SEMICONDUCTOR LAYER
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申请号: US15769912申请日: 2016-09-27
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公开(公告)号: US20180305839A1公开(公告)日: 2018-10-25
- 发明人: Stefan Reber , Kai Schillinger , Frank Siebke
- 申请人: NexWafe GmbH
- 申请人地址: DE Freiburg
- 专利权人: NexWafe GmbH
- 当前专利权人: NexWafe GmbH
- 当前专利权人地址: DE Freiburg
- 优先权: DE102015118042.1 20151022
- 国际申请: PCT/EP2016/072970 WO 20160927
- 主分类号: C30B33/02
- IPC分类号: C30B33/02 ; C30B25/18 ; C30B29/06 ; H01L21/02 ; H01L21/683
摘要:
A method for producing a semiconductor layer (3), including the following method steps: A creating a release layer (2) on a carrier substrate (1); B applying a semiconductor layer (3) to the release layer (2); C detaching the semiconductor layer (3) from the carrier substrate. The invention is characterized in that, in method step A, the release layer (2) is created so as to fully cover at least a processing side of the carrier substrate, in that, in method step B, the semiconductor layer (3) is applied so as to fully cover the release layer (2) at least on the processing side and partially overlap one or more peripheral sides (5a, 5b) of the carrier substrate and in that, between method steps B and C, in a method step C0, regions of the semiconductor layer (3) that overlap a peripheral side are removed. The invention also relates to a semiconductor wafer, to a device for edge correction, to a detaching unit and to a device for producing a semiconductor layer.
公开/授权文献
- US10508365B2 Method and device for producing a semiconductor layer 公开/授权日:2019-12-17
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