Invention Application
- Patent Title: IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD
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Application No.: US15970269Application Date: 2018-05-03
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Publication No.: US20180319075A1Publication Date: 2018-11-08
- Inventor: Tosiya Asano
- Applicant: CANON KABUSHIKI KAISHA
- Priority: JP2017-092565 20170508
- Main IPC: B29C59/02
- IPC: B29C59/02 ; B29C59/00

Abstract:
An imprint apparatus performs an imprint process of forming a pattern on a substrate by bringing a mold into contact with an imprint material on the substrate and curing the imprint material. The apparatus includes a detector configured to detect an arrangement relationship between the substrate and the mold, and an adjuster configured to adjust the arrangement relationship based on an output from the detector. The adjuster adjusts the arrangement relationship in a state in which a vibration is applied to an imprint material between the substrate and the mold, and then further adjusts the arrangement relationship in a state in which the vibration is not applied to the imprint material between the substrate and the mold.
Information query