Invention Application
- Patent Title: SENSOR ELEMENT FOR A PRESSURE SENSOR
-
Application No.: US15775253Application Date: 2016-10-14
-
Publication No.: US20180328804A1Publication Date: 2018-11-15
- Inventor: Stefan Zehringer , Zoltan Lestyan , Richard Fix , Jochen Franz , Michaela Mitschke , Tobias Sebastian Frey
- Applicant: Robert Bosch GmbH
- Priority: DE102015222756.1 20151118
- International Application: PCT/EP2016/074818 WO 20161014
- Main IPC: G01L9/08
- IPC: G01L9/08 ; G01L9/00

Abstract:
A sensor element for a pressure sensor, includes a sensor membrane on which a defined number of piezoresistors are situated, the piezoresistors being configured in a circuit in such a way that, when there is a change in pressure an electrical change in voltage can be generated; at least two temperature measuring elements configured in relation to the sensor membrane in such a way that temperatures of the sensor membrane at positions of the piezoresistors can be measured using the temperature measuring elements, an electrical voltage present at the circuit of the piezoresistors due to a temperature gradient being capable of being compensated computationally using the measured temperatures.
Public/Granted literature
- US10670482B2 Sensor element for a pressure sensor Public/Granted day:2020-06-02
Information query