- 专利标题: BONDING WIRE FOR SEMICONDUCTOR DEVICES
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申请号: US16067120申请日: 2016-09-23
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公开(公告)号: US20180374816A1公开(公告)日: 2018-12-27
- 发明人: Daizo ODA , Takumi OHKABE , Teruo HAIBARA , Takashi YAMADA , Tetsuya OYAMADA , Tomohiro UNO
- 申请人: NIPPON MICROMETAL CORPORATION , NIPPON STEEL & SUMIKIN MATERIALS CO., LTD.
- 优先权: JP2016-090613 20160428
- 国际申请: PCT/JP2016/078090 WO 20160923
- 主分类号: H01L23/00
- IPC分类号: H01L23/00 ; C22C5/10
摘要:
The present invention has as its object the provision of a bonding wire for semiconductor devices mainly comprised of Ag, in which bonding wire for semiconductor devices, the bond reliability demanded for high density mounting is secured and simultaneously a sufficient, stable bond strength is realized at a ball bond, no neck damage occurs even in a low loop, the leaning characteristic is excellent, and the FAB shape is excellent. To solve this problem, the bonding wire for semiconductor devices according to the present invention contains one or more of Be, B, P, Ca, Y, La, and Ce in a total of 0.031 at % to obtain a 0.180 at %, further contains one or more of In, Ga, and Cd in a total of 0.05 at % to 5.00 at %, and has a balance of Ag and unavoidable impurities. Due to this, it is possible to obtain a bonding wire for semiconductor devices sufficiently forming an intermetallic compound layer at a ball bond interface to secure the bond strength of the ball bond, not causing neck damage even in a low loop, having a good leaning characteristic, and having a good FAB shape.
公开/授权文献
- US11342299B2 Bonding wire for semiconductor devices 公开/授权日:2022-05-24
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