Invention Application
- Patent Title: FLUID HANDLING STRUCTURE AND LITHOGRAPHIC APPARATUS
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Application No.: US16063583Application Date: 2016-12-08
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Publication No.: US20190004434A1Publication Date: 2019-01-03
- Inventor: Erik Henricus Egidius Catharina EUMMELEN , Giovanni Luca GATTOBIGIO , Johannes Cornelis Paulus MELMAN , Han Henricus Aldegonda LEMPENS , Miao YU , Cornelius Maria ROPS , Ruud OLIESLAGERS , Artunç ULUCAN , Theodorus Wilhelmus POLET , Patrick Johannes Wilhelmus SPRUYTENBURG
- Applicant: ASML NETHERLANDS B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Priority: EP16151117.5 20160113; EP16154229.5 20160204; EP16173708.5 20160609
- International Application: PCT/EP2016/080228 WO 20161208
- Main IPC: G03F7/20
- IPC: G03F7/20 ; H01L21/027

Abstract:
An immersion lithographic apparatus having a fluid handling structure, the fluid handling structure configured to confine immersion fluid to a region and including: a meniscus controlling feature having an extractor exit on a surface of the fluid handling structure; and a gas knife system outwards of the extractor exit and including passages each having an exit, the passages having a plurality of first passages having a plurality of corresponding first exits on the surface, and a plurality of second passages having a plurality of corresponding second exits outwards of the first exits on the surface, wherein the surface faces and is substantially parallel to a top surface of a substrate during exposure, and the first exits and the second exits are arranged at a greater distance from the substrate than the extractor exit.
Public/Granted literature
- US10416571B2 Fluid handling structure and lithographic apparatus Public/Granted day:2019-09-17
Information query
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