Invention Application
- Patent Title: MEMS DEVICE
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Application No.: US15690443Application Date: 2017-08-30
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Publication No.: US20190011259A1Publication Date: 2019-01-10
- Inventor: Chiung-Wen Lin , Chiung-Cheng Lo
- Applicant: RICHTEK TECHNOLOGY CORPORATION
- Priority: CN201710546475.4 20170706
- Main IPC: G01C19/5621
- IPC: G01C19/5621 ; B81B3/00

Abstract:
A MEMS device includes at least two masses and at least one spring assembly, each of the spring assemblies including at least two folded-shape springs and at least two connection portions. The folded-shape springs are directly connected to each other at a connection point, and the folded-shape springs are respectively connected to the masses through the corresponding connection portions, for operably driving the masses to move simultaneously inward or outward in a first direction.
Information query
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