公开(公告)号：US20190120625A1

公开(公告)日：2019-04-25

申请号：US15915925

申请日：2018-03-08

Applicant: RICHTEK TECHNOLOGY CORPORATION

Inventor： Chiung-Cheng Lo ,  Chiung-Wen Lin ,  Jye Ren

IPC: G01C19/5712 ,  B81B3/00

Abstract: A MEMS device, includes: a substrate; at least two driving units, located on the substrate; at least two movable structures, respectively connected to the at least two driving units; and at least two internal mass structures, or at least one internal mass structure and at least two external mass structures, the internal mass structure being connected between the two movable structures, wherein the external mass structures are connected to and located outside the two movable structures. In response to a movement of the MEMS device, the internal mass structure rotates, and the external mass structures move in opposite directions. There is no flexible element directly connecting the mass structures, so as to reduce a coupling effect between the mass structures.

公开(公告)号：US20170030741A1

公开(公告)日：2017-02-02

申请号：US15057912

申请日：2016-03-01

Applicant: Richtek Technology Corporation

Inventor： Chiung-Wen Lin ,  Chiung-C. Lo ,  Chia-Yu Wu

IPC: G01D5/241 ,  G01D18/00

CPC classification number: G01D5/2417 ,  G01D5/24 ,  G01D18/00

Abstract: A MEMS device includes: a fixed structure, a movable structure, and a compensation circuit. The fixed structure includes a fixed electrode and a fixed compensation electrode. The movable structure includes a movable electrode and a movable compensation electrode. The movable electrode and the fixed electrode form a sensing capacitor, and the movable compensation electrode and the fixed compensation electrode form a compensation capacitor. The compensation circuit compensates a sensing signal generated by the sensing capacitor with a compensation signal generated by the compensation capacitor. The sensing capacitor and the compensation capacitor do not form a differential capacitor pair. A proportion of the sensing area of the compensation capacitor to the sensing area of the sensing capacitor is lower than 1.

Abstract translation: MEMS器件包括：固定结构，可移动结构和补偿电路。 固定结构包括固定电极和固定补偿电极。 可移动结构包括可移动电极和可移动​​补偿电极。 可动电极和固定电极形成感测电容器，可动补偿电极和固定补偿电极形成补偿电容器。 补偿电路用由补偿电容器产生的补偿信号来补偿感测电容器产生的感测信号。 感测电容器和补偿电容器不形成差分电容器对。 补偿电容器的感测区域与感测电容器的感测区域的比例小于1。

公开(公告)号：US20190011259A1

公开(公告)日：2019-01-10

申请号：US15690443

申请日：2017-08-30

Applicant: RICHTEK TECHNOLOGY CORPORATION

Inventor： Chiung-Wen Lin ,  Chiung-Cheng Lo

IPC: G01C19/5621 ,  B81B3/00

Abstract: A MEMS device includes at least two masses and at least one spring assembly, each of the spring assemblies including at least two folded-shape springs and at least two connection portions. The folded-shape springs are directly connected to each other at a connection point, and the folded-shape springs are respectively connected to the masses through the corresponding connection portions, for operably driving the masses to move simultaneously inward or outward in a first direction.