- 专利标题: Passivation Film Deposition Method For Light-Emitting Diode
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申请号: US16124475申请日: 2018-09-07
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公开(公告)号: US20190019996A1公开(公告)日: 2019-01-17
- 发明人: Hong-Jae Lee , Jong-Hwan Kim , Woo-Pil Shim , Woo-Jin Lee , Sung-Yean Yoon , Don-Hee Lee
- 申请人: TES CO., LTD.
- 专利权人: TES CO., LTD.
- 当前专利权人: TES CO., LTD.
- 优先权: KR10-2016-0027868 20160308
- 主分类号: H01L51/56
- IPC分类号: H01L51/56 ; H01L51/52
摘要:
The present invention relates to a passivation film deposition method for a light-emitting diode, comprising the steps of: depositing, on an upper part of a light-emitting diode of a substrate, a first passivation film having a silicon nitride (SiNx); and depositing, on an upper part of the first passivation film, a second passivation film having a silicon oxide (SiOx), wherein the ratio of the thickness of the first passivation film to the thickness of the second passivation film is 0.2-0.4:1.
公开/授权文献
- US10777777B2 Passivation film deposition method for light-emitting diode 公开/授权日:2020-09-15
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