Invention Application
- Patent Title: CHEMICALLY ROBUST MINIATURE GAS SENSORS
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Application No.: US16041655Application Date: 2018-07-20
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Publication No.: US20190025271A1Publication Date: 2019-01-24
- Inventor: Miaolei YAN , Roberto M. RIBEIRO
- Applicant: Apple Inc.
- Main IPC: G01N33/00
- IPC: G01N33/00

Abstract:
A miniature gas sensing device includes a silicon-based substrate embedded with multiple first heating elements. A number of electrodes are disposed on the silicon-based substrate. A gas-sensing layer covers the electrodes. A porous or mesoporous adsorbent layer selectively filters components of a gas mixture other than a target gas and allows the target gas to reach the gas-sensing layer. The first heating elements are operable to periodically regenerate sensing capabilities of at least the gas-sensing layer.
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