- 专利标题: PIEZO ACTUATORS FOR OPTICAL BEAM STEERING APPLICATIONS
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申请号: US16072164申请日: 2016-04-01
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公开(公告)号: US20190025573A1公开(公告)日: 2019-01-24
- 发明人: Aleksandar ALEKSOV , Feras EID , Sasha N. OSTER , Shawna M. LIFF , Johanna M. SWAN , Thomas L. SOUNART , Baris BICEN , Valluri R. RAO
- 申请人: Intel Corporation
- 国际申请: PCT/US2016/025667 WO 20160401
- 主分类号: G02B26/10
- IPC分类号: G02B26/10 ; G02B26/08
摘要:
Embodiments of the invention include maskless imaging tools and display systems that include piezoelectrically actuated mirrors and methods of forming such devices. According to an embodiment, the maskless imaging tool may include a light source. Additionally, the tool may include one or more piezoelectrically actuated mirrors for receiving light from the light source. In an embodiment, the piezoelectrically actuated mirrors are actuatable about one or more axes to reflect the light from the light source to a workpiece positioned to receive light from the piezoelectrically actuated mirror. Additional embodiments of the invention may include a maskless imaging tool that is a laser direct imaging lithography (LDIL) tool. Other embodiments may include a maskless imaging tool that is a via-drill tool. Embodiments of the invention may also include a piezoelectrically actuated mirror used in a projection system. For example, the projection system may be integrated into a pair of glasses.
公开/授权文献
- US10969576B2 Piezo actuators for optical beam steering applications 公开/授权日:2021-04-06
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