- 专利标题： PHOTO-IMAGEABLE THIN FILMS WITH HIGH DIELECTRIC STRENGTH
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申请号： US16079344申请日： 2017-03-16
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公开(公告)号： US20190056661A1公开(公告)日： 2019-02-21
- 发明人: Caroline Woelfle-Gupta , Yuanqiao Rao
- 申请人： Dow Global Technologies LLC
- 国际申请： PCT/US2017/022623 WO 20170316
- 主分类号： G03F7/023
- IPC分类号： G03F7/023 ; G03F7/022 ; G03F7/004
摘要：
A formulation for preparing a photo-imagable film; said formulation comprising: (a) a positive photoresist comprising a cresol novolac resin and a diazonaphthoquinone inhibitor; and (b) functionalized zirconium oxide or barium titanate nanoparticles having a molar ratio of zirconium oxide or barium titanate to ligand from 0.2 to 20.
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