- 专利标题: METHOD OF MANUFACTURING A LIQUID EJECTION HEAD
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申请号: US16124511申请日: 2018-09-07
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公开(公告)号: US20190077156A1公开(公告)日: 2019-03-14
- 发明人: Jun Yamamuro , Kazuhiro Asai , Keiji Matsumoto , Kunihito Uohashi , Keiji Watanabe , Masahisa Watanabe , Tetsushi Ishikawa , Yasuaki Tominaga , Manabu Otsuka
- 申请人: CANON KABUSHIKI KAISHA
- 优先权: JP2017-176014 20170913
- 主分类号: B41J2/16
- IPC分类号: B41J2/16
摘要:
Provided is a method of manufacturing a liquid ejection head, which is capable of patterning a dry film while suppressing deformation of the dry film caused by a pressure. The method of manufacturing a liquid ejection head includes: preparing a substrate including an ejection orifice member on a first surface; forming, on an ejection orifice surface of the ejection orifice member, a protection film having communicating holes for allowing ejection orifices to communicate to outside; closing an opening of a supply port on a second surface on a side opposite to the first surface of the substrate with a dry film; and patterning the dry film by irradiating the dry film with light under a state in which the protection film is formed on the ejection orifice surface.
公开/授权文献
- US10894409B2 Method of manufacturing a liquid ejection head 公开/授权日:2021-01-19
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