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公开(公告)号：US10894409B2
公开(公告)日：2021-01-19
申请号：US16124511
申请日：2018-09-07
发明人： Jun Yamamuro , Kazuhiro Asai , Keiji Matsumoto , Kunihito Uohashi , Keiji Watanabe , Masahisa Watanabe , Tetsushi Ishikawa , Yasuaki Tominaga , Manabu Otsuka
摘要： Provided is a method of manufacturing a liquid ejection head, which is capable of patterning a dry film while suppressing deformation of the dry film caused by a pressure. The method of manufacturing a liquid ejection head includes: preparing a substrate including an ejection orifice member on a first surface; forming, on an ejection orifice surface of the ejection orifice member, a protection film having communicating holes for allowing ejection orifices to communicate to outside; closing an opening of a supply port on a second surface on a side opposite to the first surface of the substrate with a dry film; and patterning the dry film by irradiating the dry film with light under a state in which the protection film is formed on the ejection orifice surface.
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公开(公告)号：US20190077156A1
公开(公告)日：2019-03-14
申请号：US16124511
申请日：2018-09-07
发明人： Jun Yamamuro , Kazuhiro Asai , Keiji Matsumoto , Kunihito Uohashi , Keiji Watanabe , Masahisa Watanabe , Tetsushi Ishikawa , Yasuaki Tominaga , Manabu Otsuka
IPC分类号： B41J2/16
摘要： Provided is a method of manufacturing a liquid ejection head, which is capable of patterning a dry film while suppressing deformation of the dry film caused by a pressure. The method of manufacturing a liquid ejection head includes: preparing a substrate including an ejection orifice member on a first surface; forming, on an ejection orifice surface of the ejection orifice member, a protection film having communicating holes for allowing ejection orifices to communicate to outside; closing an opening of a supply port on a second surface on a side opposite to the first surface of the substrate with a dry film; and patterning the dry film by irradiating the dry film with light under a state in which the protection film is formed on the ejection orifice surface.
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公开(公告)号：US09873255B2
公开(公告)日：2018-01-23
申请号：US15079499
申请日：2016-03-24
发明人： Koji Sasaki , Kenji Fujii , Jun Yamamuro , Kazuhiro Asai , Seiichiro Yaginuma , Keiji Matsumoto , Kunihito Uohashi , Masahisa Watanabe , Tomohiko Nakano , Keiji Edamatsu , Haruka Nakada
IPC分类号： B41J2/16
CPC分类号： B41J2/162 , B41J2/1603 , B41J2/1631 , B41J2/1632 , B41J2/1639 , B41J2/1645
摘要： A liquid ejection head includes a substrate having an energy generating element arranged therein and an ejection port forming member laid as superposed above the substrate. At least one ejection port is formed so as to run through the ejection port forming member. The ejection port forming member has a concave portion including the ejection port formed therein on the surface thereof opposite to the surface thereof facing the substrate, and has a convex portion on the surface of the ejection port forming member facing the substrate so as to correspond to the concave portion.
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公开(公告)号：US20170297336A1
公开(公告)日：2017-10-19
申请号：US15489501
申请日：2017-04-17
发明人： Jun Yamamuro , Kenji Fujii , Kazuhiro Asai , Keiji Matsumoto , Koji Sasaki , Kunihito Uohashi , Seiichiro Yaginuma , Masahisa Watanabe , Ryotaro Murakami , Tomohiko Nakano , Keiji Edamatsu , Haruka Nakada
IPC分类号： B41J2/16
CPC分类号： B41J2/1607 , B41J2/1603 , B41J2/1623 , B41J2/1628 , B41J2/1631 , B41J2/1634 , B41J2/1639 , B41J2002/14459
摘要： A method for manufacturing a liquid ejection head including the steps of preparing a substrate including, on a surface of the substrate, a layer having a plurality of openings in which opening portions of supply portions are located and which are arrayed in an array direction and another opening which is different from the plurality of openings and is located beyond the array end portion in the array direction, and attaching a dry film for forming flow passages to the substrate and the layer.
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公开(公告)号：US09789690B2
公开(公告)日：2017-10-17
申请号：US15163961
申请日：2016-05-25
发明人： Masahisa Watanabe , Jun Yamamuro , Kazuhiro Asai , Keiji Matsumoto , Koji Sasaki , Kunihito Uohashi , Ryotaro Murakami , Tomohiko Nakano , Keiji Edamatsu , Haruka Nakada , Kenji Fujii , Seiichiro Yaginuma
CPC分类号： B41J2/1628 , B41J2/1404 , B41J2/1603 , B41J2/1631
摘要： A method for manufacturing a liquid ejection head includes the steps of: preparing a substrate including an energy-generating element disposed on a first surface of the substrate and a supply path for liquid; disposing a dry film on the first surface of the substrate in such a manner that the dry film partially enters the supply path; etching the dry film from a side of the dry film facing the first surface of the substrate so that the dry film has an etched surface substantially in parallel with the first surface and covers the supply path; forming a resin layer to be a flow path member on the dry film covering the supply path; and removing the dry film covering the supply path.
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公开(公告)号：US20170232745A1
公开(公告)日：2017-08-17
申请号：US15586113
申请日：2017-05-03
发明人： Seiichiro Yaginuma , Keiji Matsumoto , Koji Sasaki
IPC分类号： B41J2/16
CPC分类号： B41J2/1632 , B41J2/1603 , B41J2/162 , B41J2/1623 , B41J2/1626 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1634 , B41J2/1635 , B41J2/1639 , B41J2/1646 , Y10T29/49401
摘要： A method for manufacturing liquid ejection heads includes the steps of forming ejection port members on a substrate, the ejection port members each having a liquid channel and an ejection port for ejecting liquid through the channel, the liquid channel communicating with the substrate; forming supply ports passing through the substrate to supply liquid to the channels; and forming a separation groove in the substrate to separate the substrate for each liquid ejection head. The step of forming the ejection port members includes the step of hardening a material constituting the ejection port member by heat treatment. The step of forming the separation groove is performed before the step of hardening.
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公开(公告)号：US20160271949A1
公开(公告)日：2016-09-22
申请号：US15044514
申请日：2016-02-16
发明人： Jun Yamamuro , Kazuhiro Asai , Keiji Matsumoto , Koji Sasaki , Masahisa Watanabe , Kunihito Uohashi , Seiichiro Yaginuma , Ryotaro Murakami , Kenji Fujii
CPC分类号： B41J2/1603 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1639 , B41J2/1645
摘要： A process for producing a liquid discharge head including a substrate having a liquid supply path passing through from its first surface to second surface and an discharge port forming member having a discharge port communicating with the supply path through a flow path, the process including providing a first layer of photosensitive resin in a region covering an opening of the supply path in the first surface; forming a latent image of a pattern of the flow path in the first layer by exposure; providing a second layer of negative photosensitive resin on the first layer; curing a portion, opposing to the opening of the supply path in the first surface, of the second layer; forming a latent image of a pattern of the discharge port in the second layer by exposure; and developing latent images of patterns of the flow path and discharge port.
摘要翻译： 一种液体排出头的制造方法，其特征在于，包括具有从第一面到第二面通过的液体供给路径的基板和具有通过流路与供给路连通的排出口的排出口形成部件，该工序包括： 在覆盖第一表面中的供给路径的开口的区域中的第一层感光性树脂; 通过曝光形成第一层中的流路图案的潜像; 在第一层上提供第二层负型感光性树脂; 固化与第二表面中的供应路径的开口相对的部分; 通过曝光形成第二层中的排出口的图案的潜像; 以及显影流路和排出口的图案的潜像。
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公开(公告)号：US20140151336A1
公开(公告)日：2014-06-05
申请号：US14089629
申请日：2013-11-25
发明人： Koji Sasaki , Shuji Koyama , Keiji Matsumoto , Seiichiro Yaginuma
IPC分类号： B41J2/16
CPC分类号： B41J2/1634 , B41J2/1603 , B41J2/1629 , B41J2/1631 , B41J2/1639 , B41J2/1645
摘要： A manufacturing method of a liquid discharging head includes: preparing a substrate having an energy-generating element and a resin layer on a first face side; irradiating a laser beam on the substrate so as to pass through the resin layer to form a hole serving as a liquid supply port in the substrate; removing a portion of the resin layer including a region which the laser beam has passed through, thereby forming a portion from which the resin layer has been removed as a channel, and forming a portion in which the resin layer remains as a side wall; and forming a discharge port forming member on a far side from the substrate of the side wall, and to form the channel forming member using the side wall and the discharge port forming member.
摘要翻译： 液体排出头的制造方法包括：在第一面侧准备具有发光元件和树脂层的基板; 在基板上照射激光束以通过树脂层，以在基板中形成用作液体供给口的孔; 除去包括激光束已经通过的区域的树脂层的一部分，从而形成树脂层已被除去的部分作为沟道，并且形成树脂层保留为侧壁的部分; 在侧壁的基板的远侧形成排出口形成部件，并且使用侧壁和排出口形成部件形成流路形成部件。
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公开(公告)号：US20140083974A1
公开(公告)日：2014-03-27
申请号：US14011940
申请日：2013-08-28
发明人： Keiji Matsumoto , Kazuhiro Asai , Kunihito Uohashi
IPC分类号： B41J2/005
CPC分类号： B41J2/005 , B41J2/1603 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1635 , B41J2/1639 , B41J2/1642 , B41J2/1645
摘要： A process for producing a liquid ejection head, comprising providing a substrate with an energy-generating element for ejecting liquid and a wiring; forming a flow path wall forming layer containing a negative photosensitive resin on the substrate; exposing a portion to be a flow path wall of the flow path wall forming layer; forming an ejection orifice forming layer containing a negative photosensitive resin on the flow path wall forming layer; applying a material for a water-repellent layer onto the ejection orifice forming layer; drying a solvent contained in the applied material to form the water-repellent layer; exposing another region than a portion to be an ejection orifice of the ejection orifice forming layer and the water-repellent layer; and dissolving and removing the non-exposed portions, wherein the boiling point of the solvent is not more than the drying temperature in the step to form the water-repellent layer.
摘要翻译： 一种液体喷射头的制造方法，其特征在于，在基板上设置喷射液体的发光元件和配线; 在基板上形成含有负性感光性树脂的流路壁形成层; 使作为流路壁形成层的流路壁的部分露出; 在流路壁形成层上形成含有负性感光性树脂的喷射孔形成层; 将防水层的材料施加到喷射孔形成层上; 干燥所施加的材料中所含的溶剂以形成拒水层; 暴露出与喷射孔形成层和防水层的喷射口的部分不同的区域; 并且溶解和除去非暴露部分，其中溶剂的沸点不大于在步骤中形成防水层的干燥温度。
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公开(公告)号：US10343406B2
公开(公告)日：2019-07-09
申请号：US15391417
申请日：2016-12-27
发明人： Keiji Matsumoto , Jun Yamamuro , Kazuhiro Asai , Koji Sasaki , Kunihito Uohashi , Seiichiro Yaginuma , Ryotaro Murakami , Masahisa Watanabe , Tomohiko Nakano , Keiji Edamatsu , Haruka Nakada , Kenji Fujii
摘要： A liquid ejection head has an ejection port forming region which includes liquid ejection energy generating elements arranged on a substrate, liquid supply ports each running through the substrate and having an opening at a surface of the substrate, a liquid path formed on the surface as a space containing the liquid ejection energy generating elements and the liquid supply ports therein, and ejection ports corresponding to the respective liquid ejection energy generating elements. The liquid ejection head is manufactured by forming a liquid path forming layer on the substrate using a dry film resist, forming an ejection port forming layer on the liquid path forming layer, forming a liquid path in the liquid path forming layer and ejection ports in the ejection port forming layer. The substrate has dummy holes each having an opening at a surface of the substrate outside the ejection port forming region.
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