- 专利标题: METHOD AND DEVICE FOR HOMOGENEOUSLY COATING 3D SUBSTRATES
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申请号: US16129039申请日: 2018-09-12
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公开(公告)号: US20190078197A1公开(公告)日: 2019-03-14
- 发明人: Sven HÄBERLEIN , Andreas VOGT , Roland MAUDRICH
- 申请人: FHR ANLAGENBAU GMBH
- 申请人地址: DE Ottendorf-Okrilla
- 专利权人: FHR ANLAGENBAU GMBH
- 当前专利权人: FHR ANLAGENBAU GMBH
- 当前专利权人地址: DE Ottendorf-Okrilla
- 优先权: DE102017121327.9 20170914
- 主分类号: C23C14/34
- IPC分类号: C23C14/34 ; C23C14/56 ; C23C14/54
摘要:
A method and a device are provided for homogeneously coating surfaces of 3D substrates in a vacuum chamber which has a sputtering source, such as a planar source or a tube or double-tube source, wherein individual substrates, with a curved substrate surface directed toward the sputtering source, are able to be moved past said source in a translational manner. The sputtering source is fastened to a chamber wall within a vacuum chamber so as to have two degrees of freedom such that the sputtering source is able to be set both in terms of its spacing to a surface to be coated of a substrate, which is moved past in front of said sputtering source in a translational manner, and with respect to the surface normal of the surface to be coated proceeding from a fixed point such that the surface normal deviation is 0° at all times.
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