- 专利标题: PRESSURE SENSOR CAP HAVING FLOW PATH WITH DIMENSION VARIATION
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申请号: US16129355申请日: 2018-09-12
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公开(公告)号: US20190078914A1公开(公告)日: 2019-03-14
- 发明人: Holger Doering , Omar Abed
- 申请人: Silicon Microstructures, Inc.
- 申请人地址: US CA Milpitas
- 专利权人: Silicon Microstructures, Inc.
- 当前专利权人: Silicon Microstructures, Inc.
- 当前专利权人地址: US CA Milpitas
- 主分类号: G01F1/40
- IPC分类号: G01F1/40 ; G01F1/36 ; G01L1/10
摘要:
Pressure sensors that may be used in flowrate monitoring or measuring systems, where the pressure sensors may enable simple, low-cost designs that are readily implemented. One example may provide a pressure sensor having a built-in flow path with a dimensional variation. Pressures of a fluid on each side of the dimensional variation may be compared to each other. The measured differential pressure may then be converted to a flowrate through the flow path.
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