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    Pressure sensor cap having flow path with dimension variation
    1.
    发明授权
    Pressure sensor cap having flow path with dimension variation 有权

    公开(公告)号：US10655989B2

    公开(公告)日：2020-05-19

    申请号：US16129355

    申请日：2018-09-12

    申请人： Silicon Microstructures, Inc.

    发明人： Holger Doering ,  Omar Abed

    IPC分类号： G01F1/40 ,  G01F1/36 ,  G01L1/10 ,  G01F1/44

    摘要： Pressure sensors that may be used in flowrate monitoring or measuring systems, where the pressure sensors may enable simple, low-cost designs that are readily implemented. One example may provide a pressure sensor having a built-in flow path with a dimensional variation. Pressures of a fluid on each side of the dimensional variation may be compared to each other. The measured differential pressure may then be converted to a flowrate through the flow path.

    PRESSURE SENSOR HAVING CAP-DEFINED MEMBRANE
    4.
    发明申请
    PRESSURE SENSOR HAVING CAP-DEFINED MEMBRANE 审中-公开
    带有定义膜的压力传感器

    公开(公告)号：US20160033349A1

    公开(公告)日：2016-02-04

    申请号：US14622576

    申请日：2015-02-13

    申请人： Silicon Microstructures, Inc.

    发明人： Omar Abed

    IPC分类号： G01L9/00 ,  B81B7/00

    CPC分类号： G01L9/0048 ,  B81B7/0016 ,  G01L9/0042 ,  G01L9/0047 ,  G01L9/0051

    摘要： Structures and methods of protecting membranes on pressure sensors. One example may provide a pressure sensor having a backside cavity defining a frame and under a membrane formed in a device layer. The pressure sensor may further include a cap joined to the device layer by a bonding layer. A recess for a reference cavity may be formed in one or more of the cap, bonding layer, and membrane or other device layer portion. The recess may have a width that is narrower than a width of the backside cavity in at least one direction. In other examples, the recess may be shaped such that it has an outer edge that is within an outer edge of the backside cavity. This may reinforce a junction of the device layer and frame. The recess may define an active membrane spaced away from the device layer and backside cavity junction.

    摘要翻译： 在压力传感器上保护膜的结构和方法。 一个示例可以提供一种压力传感器，该压力传感器具有限定框架的背侧空腔以及在器件层中形成的膜下方。 压力传感器还可以包括通过结合层连接到器件层的盖。 用于参考空腔的凹槽可以形成在帽，粘合层，膜或其它器件层部分中的一个或多个中。 所述凹部的宽度可以在至少一个方向上比所述背侧腔的宽度窄。 在其他示例中，凹部可以成形为使得其具有位于背侧空腔的外边缘内的外边缘。 这可能会加强设备层和框架的连接。 凹部可以限定与器件层和背面腔结的间隔开的活性膜。

    PRESSURE SENSOR CAP HAVING FLOW PATH WITH DIMENSION VARIATION
    6.
    发明申请
    PRESSURE SENSOR CAP HAVING FLOW PATH WITH DIMENSION VARIATION 审中-公开

    公开(公告)号：US20190078914A1

    公开(公告)日：2019-03-14

    申请号：US16129355

    申请日：2018-09-12

    申请人： Silicon Microstructures, Inc.

    发明人： Holger Doering ,  Omar Abed

    IPC分类号： G01F1/40 ,  G01F1/36 ,  G01L1/10

    摘要： Pressure sensors that may be used in flowrate monitoring or measuring systems, where the pressure sensors may enable simple, low-cost designs that are readily implemented. One example may provide a pressure sensor having a built-in flow path with a dimensional variation. Pressures of a fluid on each side of the dimensional variation may be compared to each other. The measured differential pressure may then be converted to a flowrate through the flow path.

    FLOW SENSOR
    8.
    发明申请
    FLOW SENSOR 审中-公开

    公开(公告)号：US20200284632A1

    公开(公告)日：2020-09-10

    申请号：US16734359

    申请日：2020-01-05

    申请人： Silicon Microstructures, Inc.

    发明人： Omar Abed ,  Gertjan van Sprakelaar ,  Justin Gaynor

    IPC分类号： G01F1/69 ,  G01F1/684 ,  G01F1/696

    摘要： Reliable flow sensors with enclosures that have predictable thermal variations and reduced mechanical tolerances for a more consistent fluid flow and more consistent flow measurements. Thermal variations can be made predictable by using etched structures in silicon blocks. Mechanical tolerances can be reduced using lithography and high-precision semiconductor manufacturing equipment and techniques.