- 专利标题: PACKAGING METHOD AND ASSOCIATED PACKAGING STRUCTURE
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申请号: US16046651申请日: 2018-07-26
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公开(公告)号: US20190100431A1公开(公告)日: 2019-04-04
- 发明人: Chih-Ming Chen , Yuan-Chih Hsieh , Chung-Yi Yu
- 申请人: Taiwan Semiconductor Manufacturing Company Ltd.
- 主分类号: B81C1/00
- IPC分类号: B81C1/00 ; H01L25/00 ; B81B7/00 ; H01L23/488
摘要:
The present disclosure provides a packaging method, including: providing a first semiconductor substrate; forming a bonding region on the first semiconductor substrate, wherein the bonding region of the first semiconductor substrate includes a first bonding metal layer and a second bonding metal layer; providing a second semiconductor substrate having a bonding region, wherein the bonding region of the second semiconductor substrate includes a third bonding layer; and bonding the first semiconductor substrate to the second semiconductor substrate by bringing the bonding region of the first semiconductor substrate in contact with the bonding region of the second semiconductor substrate; wherein the first and third bonding metal layers include copper (Cu), and the second bonding metal layer includes Tin (Sn). An associated packaging structure is also disclosed.
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