Invention Application
- Patent Title: PHOTOELECTRIC CONVERTER AND X-RAY DETECTOR
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Application No.: US16090529Application Date: 2017-03-30
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Publication No.: US20190115385A1Publication Date: 2019-04-18
- Inventor: HIROYUKI MORIWAKI , KAZUHIDE TOMIYASU , MAKOTO NAKAZAWA , FUMIKI NAKANO , WATARU NAKAMURA
- Applicant: SHARP KABUSHIKI KAISHA
- Applicant Address: JP Sakai City, Osaka
- Assignee: SHARP KABUSHIKI KAISHA
- Current Assignee: SHARP KABUSHIKI KAISHA
- Current Assignee Address: JP Sakai City, Osaka
- Priority: JP2016-074729 20160401
- International Application: PCT/JP2017/013408 WO 20170330
- Main IPC: H01L27/146
- IPC: H01L27/146 ; G01T1/20

Abstract:
A photoelectric converter of one aspect of the present invention is provided with an element substrate having a photodiode and a thin film transistor arranged in matrix form, an interlayer insulating film laminated on the thin film transistor, a first contact hole formed in the interlayer insulating film and reaching a surface of a source electrode of the thin film transistor, and a second contact hole formed in the interlayer insulating film and reaching a surface of a drain electrode of the thin film transistor, in which a source bus line and the source electrode of the thin film transistor are connected via the first contact hole, the drain electrode of the thin film transistor and a lower layer electrode of the photodiode are connected via the second contact hole, and the tapered part of the second contact hole has a gentler inclination than the tapered part of the first contact hole.
Information query
IPC分类: