Invention Application
- Patent Title: PIEZOELECTRIC PACKAGE-INTEGRATED PRESSURE SENSING DEVICES
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Application No.: US16097600Application Date: 2016-07-01
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Publication No.: US20190165250A1Publication Date: 2019-05-30
- Inventor: Thomas L. SOUNART , Feras EID , Sasha N. OSTER , Georgios C. DOGIAMIS , Adel A. ELSHERBINI , Shawna M. LIFF , Johanna M. SWAN
- Applicant: Intel Corporation
- International Application: PCT/US2016/040845 WO 20160701
- Main IPC: H01L41/09
- IPC: H01L41/09 ; H01L41/113 ; B81B3/00 ; G01L9/00

Abstract:
Embodiments of the invention include a pressure sensing device having a membrane that is positioned in proximity to a cavity of an organic substrate, a piezoelectric material positioned in proximity to the membrane, and an electrode in contact with the piezoelectric material. The membrane deflects in response to a change in ambient pressure and this deflection causes a voltage to be generated in the piezoelectric material with this voltage being proportional to the change in ambient pressure.
Information query
IPC分类: