- 专利标题: MAGNETIC MEMORY DEVICE AND METHOD OF FABRICATING THE SAME
-
申请号: US16009556申请日: 2018-06-15
-
公开(公告)号: US20190165261A1公开(公告)日: 2019-05-30
- 发明人: Sang-Kuk KIM , Oik KWON , Dongkyu LEE , Kyungil HONG
- 申请人: SAMSUNG ELECTRONICS CO., LTD.
- 申请人地址: KR Suwon-si
- 专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人地址: KR Suwon-si
- 优先权: KR10-2017-0160001 20171128
- 主分类号: H01L43/12
- IPC分类号: H01L43/12 ; H01L27/22 ; H01L43/02
摘要:
A method of fabricating a magnetic memory device may include forming a magnetic tunnel junction layer on a substrate, sequentially forming a top electrode pattern and a mask pattern on the magnetic tunnel junction layer, patterning the magnetic tunnel junction layer using the mask pattern and the top electrode pattern as a first etch mask to form a magnetic tunnel junction pattern, forming a protection layer on side surfaces of the mask pattern, the top electrode pattern, and the magnetic tunnel junction pattern, the protection layer being extended to cover a first top surface of the mask pattern, removing a portion of the protection layer on the first top surface of the mask pattern to expose the first top surface of the mask pattern, and removing the mask pattern to expose a second top surface of the top electrode pattern.
信息查询
IPC分类: