- 专利标题: METHOD OF MANUFACTURING DISPLAY DEVICE INCLUDING MULTILAYERED LINES ARRANGED AT FINE INTERVALS
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申请号: US16026742申请日: 2018-07-03
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公开(公告)号: US20190198535A1公开(公告)日: 2019-06-27
- 发明人: In Kyung Yoo , Chong Sup Chang , Dong Hyun Yang
- 申请人: Samsung Display Co., Ltd.
- 优先权: KR10-2017-0181007 20171227
- 主分类号: H01L27/12
- IPC分类号: H01L27/12 ; H01L21/3213
摘要:
A method of manufacturing a display device, includes providing a substrate including a first stepped part, forming a metal layer on the substrate and the first stepped part, forming an organic layer pattern on the metal layer at a position corresponding to a sidewall of the stepped part, forming a photosensitive layer on the metal layer and the organic layer pattern, patterning the photosensitive layer to form a photosensitive layer pattern adjacent to the organic layer pattern, and forming a metal line by removing the organic layer pattern and an exposed portion of the metal layer through an etching process using the photosensitive layer pattern as a mask.
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