• 专利标题: COMPOSITION FOR SURFACE TREATMENT
  • 申请号: US16330034
    申请日: 2017-08-09
  • 公开(公告)号: US20190203027A1
    公开(公告)日: 2019-07-04
  • 发明人: Jingzhi CHEN
  • 申请人: FUJIMI INCORPORATED
  • 优先权: JP2016-184768 20160921
  • 国际申请: PCT/JP2017/029003 WO 20170809
  • 主分类号: C08L29/04
  • IPC分类号: C08L29/04 C08G61/04 H01L21/02
COMPOSITION FOR SURFACE TREATMENT
摘要:
To provide a composition for surface treatment capable of treating a surface of a polished object to be polished having both of a silicon-silicon bond and a nitrogen-silicon bond by sufficiently removing defects on the surface of the polished object to be polished. The composition for surface treatment contains a nonionic water-soluble polymer (A) having a main chain including only a carbon atom or a main chain consisting of a carbon atom and a nitrogen atom, and an anionic water-soluble polymer (B) having a main chain including only a carbon atom and a side chain having a sulfonic acid group or a group having a salt thereof or a carboxyl group or a group having a salt thereof, and being bonded to the main chain including only a carbon atom, and the composition is used for surface treatment of a polished object to be polished containing a silicon-silicon bond and a nitrogen-silicon bond and a pH of the composition is less than 9.0.
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