Invention Application
- Patent Title: SEMICONDUCTOR DEVICE
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Application No.: US16367329Application Date: 2019-03-28
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Publication No.: US20190221674A1Publication Date: 2019-07-18
- Inventor: Yutaka OKAZAKI , Akihisa SHIMOMURA , Naoto YAMADE , Tomoya TAKESHITA , Tetsuhiro TANAKA
- Applicant: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Priority: JP2015-140794 20150714
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L29/45 ; H01L27/12 ; H01L29/49 ; H01L29/66

Abstract:
A transistor with favorable electrical characteristics is provided. One embodiment of the present invention is a semiconductor device including a semiconductor, a first insulator in contact with the semiconductor, a first conductor in contact with the first insulator and overlapping with the semiconductor with the first insulator positioned between the semiconductor and the first conductor, and a second conductor and a third conductor, which are in contact with the semiconductor. One or more of the first to third conductors include a region containing tungsten and one or more elements selected from silicon, carbon, germanium, tin, aluminum, and nickel.
Public/Granted literature
- US10763373B2 Semiconductor device Public/Granted day:2020-09-01
Information query
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