- 专利标题： Organoamino-Functionalized Cyclic Oligosiloxanes for Deposition of Silicon-Containing Films
-
申请号： US16376548申请日： 2019-04-05
-
公开(公告)号： US20190233446A1公开(公告)日： 2019-08-01
- 发明人: Matthew R. MacDonald , Xinjian Lei , Manchao Xiao , Meiliang Wang
- 申请人： Versum Materials US, LLC
- 申请人地址： US AZ Tempe
- 专利权人： Versum Materials US, LLC
- 当前专利权人： Versum Materials US, LLC
- 当前专利权人地址： US AZ Tempe
- 主分类号： C07F7/21
- IPC分类号： C07F7/21
摘要：
Organoamino-functionalized cyclic oligosiloxanes, which have at least two silicon and two oxygen atoms as well as an organoamino group and methods for making the organoamino-functionalized cyclic oligosiloxanes are disclosed. Methods for depositing silicon and oxygen containing films using the organoamino-functionalized cyclic oligosiloxanes are also disclosed.
公开/授权文献
信息查询
