Invention Application
- Patent Title: Position And Temperature Monitoring Of ALD Platen Susceptor
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Application No.: US16388132Application Date: 2019-04-18
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Publication No.: US20190244842A1Publication Date: 2019-08-08
- Inventor: Abraham Ravid , Kevin Griffin , Joseph Yudovsky , Kaushal Gangakhedkar , Dmitry A. Dzilno , Alex Minkovich
- Applicant: Applied Materials, Inc.
- Main IPC: H01L21/67
- IPC: H01L21/67 ; C23C16/455 ; H01L21/687 ; C23C16/52 ; C23C16/458
Abstract:
Apparatus and methods of measuring and controlling the gap between a susceptor assembly and a gas distribution assembly are described. Apparatus and methods for positional control and temperature control for wafer transfer purposes are also described.
Public/Granted literature
- US11430680B2 Position and temperature monitoring of ALD platen susceptor Public/Granted day:2022-08-30
Information query
IPC分类:
